Group III-nitride layers with patterned surfaces

Details Group III-nitride layers with patterned surfaces Group III-nitride layers with patterned surfaces

2006-05-27

2008-12-23

Williams, Joseph L (Department: 2889)

Electric lamp and discharge devices

Discharge devices having a multipointed or serrated edge...

C313S336000, C313S351000

Reexamination Certificate

active

07468578

ABSTRACT:
A fabrication method produces a mechanically patterned layer of group III-nitride. The method includes providing a crystalline substrate and forming a first layer of a first group III-nitride on a planar surface of the substrate. The first layer has a single polarity and also has a pattern of holes or trenches that expose a portion of the substrate. The method includes then, epitaxially growing a second layer of a second group III-nitride over the first layer and the exposed portion of substrate. The first and second group III-nitrides have different alloy compositions. The method also includes subjecting the second layer to an aqueous solution of base to mechanically pattern the second layer.

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