Grooved Schottky barrier photodiode for infrared sensing

Details Grooved Schottky barrier photodiode for infrared sensing Grooved Schottky barrier photodiode for infrared sensing

1987-12-21

1989-10-24

Mintel, William A.

357 15, 357 55, 357 60, 357 67, 357 32, H01L 2714

Patent

active

048765864

ABSTRACT:
A sensor optimized for detecting infrared radiation is formed by a Schottky barrier photodiode having a corrugated upper surface upon which a thin layer of metal silicide is deposited. The corrugated surface is formed by selective etching of a (100) silicon wafer to expose the (111) crystalline plane.

REFERENCES:
patent: 3585714 (1971-06-01), Li
patent: 4037311 (1977-07-01), Blackman et al.
patent: 4079507 (1978-03-01), King
patent: 4135290 (1979-01-01), Evans, Jr.
patent: 4234887 (1980-11-01), Vanderslice, Jr.
patent: 4276099 (1981-06-01), Keen et al.
patent: 4364164 (1982-12-01), Bluzer et al.
patent: 4371406 (1983-02-01), Li
patent: 4488163 (1984-12-01), Bluze et al.
patent: 4528260 (1985-07-01), Kane
patent: 4565756 (1986-01-01), Needs et al.
patent: 4604161 (1986-08-01), Araghi
patent: 4703337 (1987-10-01), Yamazaki
Kosonocky et al., "160.times.244 Element Pts: Schottky-Barrier IR-CCB Image Sensor," IEEE Special Issue of Transactions, E,B, 1985, pp. 1-29.
McKee, "Enhanced Quantum Efficiency of Pd.sub.2 Si Schottky Infrared Diodes on 111Si," IEEE Transactions on Electron Devices (Jul. 1984) ED-31(7), 968-970.
Bassovs et al., "Fabrication of Dense Arrays of Nozzles and Channels with High Degree of Precision," IBM Technical Disclosure Bulletin, vol. 19, No. 6, Nov. 76, 2243-46.
Wolf, "Photovoltaics II: Flat Panels," IEEE Spectrum, Feb. 1980, pp. 32-33.

Affiliated with

Also associated with

Rating

Grooved Schottky barrier photodiode for infrared sensing does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Grooved Schottky barrier photodiode for infrared sensing, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Grooved Schottky barrier photodiode for infrared sensing will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1592130