Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent
1982-08-13
1984-03-27
Smith, John D.
Coating apparatus
Gas or vapor deposition
Multizone chamber
118718, 118733, 226 97, 34242, 227 3, C23C 1310
Patent
active
044387245
ABSTRACT:
A grooved passageway surface in a magnetic gas gate, the gas gate adapted to operatively connect two adjacent chambers, in the first chamber of which process gases are introduced for depositing a first layer upon a magnetic substrate and in the second chamber of which process gases are introduced for depositing a second layer atop the first layer. Since it is important to prevent the second chamber gases from contaminating the first chamber gases, a constant pressure differential established between the chambers is employed to provide a substantially unidirectional flow of gases from the first chamber into the second chamber. Magnetic gas gates have been used in the prior art to reduce the size of gas gate passageways by creating a magnetic field which urges the unlayered surface of the substrate toward a wall of the passageway. Although, thereby reducing the size of the passageway opening and correspondingly reducing the back diffusion of gases from the second chamber, the passageway is simultaneously divided into a relatively large flow channel and a relatively narrow flow channel. The present invention is concerned with reducing the back diffusion of gases through the relatively narrow flow channel. This is accomplished by forming a plurality of elongated grooves in the passageway wall toward which the unlayered surface of the substrate is urged. The grooves are substantially coextensive with the length of the passageway so as to operatively interconnect the adjacent chambers. The flow channels thus established are able to accommodate a sufficient flow rate of process gases to further reduce the back diffusion of process gases.
REFERENCES:
patent: 4065137 (1977-12-01), Rueggeberg et al.
patent: 4354686 (1982-10-01), Imanishi et al.
Doehler Joachim
Gattuso David A.
Hoffman Kevin R.
Energy Conversion Devices Inc.
Plantz Bernard F.
Siskind Marvin S.
Smith John D.
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