Electric lamp and discharge devices – With positive or negative ion acceleration
Patent
1997-07-25
1999-10-26
Patel, Nimeshkumar D.
Electric lamp and discharge devices
With positive or negative ion acceleration
3133631, 3133621, 31523131, H01J 152
Patent
active
059734477
ABSTRACT:
Plasma beam apparatus and method for the purpose of vacuum processing temperature sensitive materials at high discharge power and high processing rates. A gridless, closed or non-closed Hall-Current ion source is described which features a unique fluid-cooled anode with a shadowed gap through which ion source feed gases are introduced while depositing feed gases are injected into the plasma beam. The shadowed gap provides a well maintained, electrically active area at the anode surface which stays relatively free of non-conductive deposits. The anode discharge region is insulatively sealed to prevent discharges from migrating into the interior of the ion source. Thin vacuum gaps are also used between anode and non-anode components in order to preserve electrical isolation of the anode when depositing conductive coatings. The magnetic field of the Hall-Current ion source is produced by an electromagnet driven either by the discharge current or a periodically alternating current.
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Daniels Brian Kenneth
Fodor Florian Joseph
Mahoney Leonard Joseph
Petrmichl Rudolph Hugo
Venable III Ray Hays
Monsanto Company
Patel Nimeshkumar D.
Williams Joseph
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