Grid structure for reducing current density in focussed ion beam

Details Grid structure for reducing current density in focussed ion beam Grid structure for reducing current density in focussed ion beam

1991-04-26

1992-10-27

Albritton, C. L.

Electric heating

Metal heating

By arc

2505051, B23K 1500

Patent

active

051591707

ABSTRACT:
A transmission grid is disposed in a conventional focussed ion beam system which includes an ion beam source emitter or ion gun, electrodes to turn the ion beam off and on, a beam defining aperture and electrostatic lenses to focus the ion beam onto a target. The elements of the ion beam system are disposed in a chamber which is provided with an inlet port and an outlet port. Gas is introduced into chamber via the inlet port where it is ionized by the ion beam into an ion plasma to be used to deposit materials onto the target. The transmission grid, is interposed which is a fine mesh, passive element is located in the path of the ion beam and reduces the ion beam current density by a desired value. The transmission grid may be configured with a variety of different transmissions so the current density can be adjusted in different increments depending on the gas/type of deposition to be performed.

REFERENCES:
patent: 2925496 (1960-02-01), Zoubek
patent: 3440466 (1969-04-01), Colvin et al.
patent: 3622741 (1971-11-01), Steigerwald
patent: 4087695 (1978-05-01), Lee et al.
patent: 4389573 (1983-06-01), Itoh
patent: 4416724 (1983-11-01), Fischer
patent: 4450031 (1984-05-01), Ono et al.
patent: 4457803 (1984-07-01), Takigawa
patent: 4523971 (1985-06-01), Cuomo et al.
patent: 4527044 (1985-07-01), Bruel et al.
patent: 4560878 (1985-12-01), Knauer et al.
patent: 4607333 (1986-08-01), Yasutake et al.
patent: 4620858 (1986-01-01), Banks et al.
patent: 4758304 (1988-07-01), McNeil et al.

Affiliated with

Also associated with

Rating

Grid structure for reducing current density in focussed ion beam does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Grid structure for reducing current density in focussed ion beam, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Grid structure for reducing current density in focussed ion beam will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-907204