Optical: systems and elements – Optical modulator – Light wave temporal modulation
Patent
1998-10-15
2000-03-14
Epps, Georgia
Optical: systems and elements
Optical modulator
Light wave temporal modulation
359223, 359224, 359298, 348781, 348782, G02B 2608
Patent
active
060380586
ABSTRACT:
A micromirror light valve target configuration that overcomes the problems of limited deflection range, electrostatic and resolution by forming the secondary electron collector grid of a fine conductive mesh and placing it in close proximity to the micromirror array. The source, preferably a fixed beam array, addresses the micromirror array such that it exhibits a secondary emission coefficient less than one to write a negative charge pattern onto the mirrors so that they are attracted to the collector grid. If the anode is also in close proximity to the array, the mirrors can be addressed so that they deflect up toward the grid and down toward the anode thereby increasing the deflection range.
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Gifford Eric A.
Little Michael J.
Robinson William P.
Burke Margaret
Epps Georgia
MEMSolutions, Inc.
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