Grazing incidence mirror, lithographic apparatus including a...

Details Grazing incidence mirror, lithographic apparatus including a... Grazing incidence mirror, lithographic apparatus including a...

2007-06-26

2007-06-26

Vanore, David A. (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

C378S034000, C378S035000, C427S523000, C428S141000

Reexamination Certificate

active

10860656

ABSTRACT:
A grazing incidence mirror includes a mirror substrate and a mirror surface layer, the mirror surface layer including a first layer and a second layer, the first layer being positioned between the mirror substrate and the second layer. The first layer includes a material selected from the group of Mo, Nb and combinations thereof, and the second layer includes a material selected from the group of B, C, B4C, SiC and combinations thereof. Such a grazing incidence mirror can be used in lithographic apparatus and in device manufacturing methods and provides a reflectivity that may be larger than state of the art grazing incidence mirrors based on Ru.

REFERENCES:
patent: 5433988 (1995-07-01), Fukuda et al.
patent: 6159558 (2000-12-01), Wolfe et al.
patent: 6522716 (2003-02-01), Murakami et al.

Affiliated with

Also associated with

Rating

Grazing incidence mirror, lithographic apparatus including a... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Grazing incidence mirror, lithographic apparatus including a..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Grazing incidence mirror, lithographic apparatus including a... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3855967