Grazing incidence interferometry for measuring transparent plane

Details Grazing incidence interferometry for measuring transparent plane Grazing incidence interferometry for measuring transparent plane

1997-11-20

1999-07-13

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356357, 356359, G01B 902

Patent

active

059234253

ABSTRACT:
A grazing incidence interferometer includes an extended light source for limiting spatial coherence of reference and test beams. A test plate is oriented at a grazing incidence to the test beam so that a first portion of the test beam is reflected from the front surface of the test plate, a second portion of the test beam is reflected from the back surface of the test plate, and the two test beam portions are sheared with respect to each other. The spatial coherence of the test beam is related to the lateral shear between the first and second test beam portions to significantly reduce contrast of an interference fringe pattern between the front and back surfaces of the test plate. Also, the reference beam is realigned with just one of the two test beam portions to favor the formation of an interference pattern between the reference surface and one of the front and back surfaces of the test plate over the formation of an interference pattern between the reference surface and the other of the front and back surfaces of the test plate.

REFERENCES:
patent: 4072423 (1978-02-01), Kimura et al.
patent: 4221486 (1980-09-01), Jaerisch et al.
patent: 4325637 (1982-04-01), Moore
patent: 4859061 (1989-08-01), Inoue
patent: 5327219 (1994-07-01), Steimle et al.
patent: 5488477 (1996-01-01), de Groot
patent: 5568256 (1996-10-01), Korner et al.
"Measurement of the Inhomogeneity of a Window" by Chiayu Ai and James C. Wyant, Optical Engineering, Sep. 1991, vol. 30 No. 9, pp. 1399-1404.
"Twyman-Green Interferometer For Testing Microspheres" by Johannes Schwider and Oliver Falkenstorfer, Optical Engineering, Oct. 1995, vol. 34, No. 10, pp. 2972-2975.

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