Graytone mask and manufacturing method thereof

Details Graytone mask and manufacturing method thereof Graytone mask and manufacturing method thereof

2005-01-11

2005-01-11

Letscher, Geraldine (Department: 1752)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

C430S319000, C430S320000

Reexamination Certificate

active

06841315

ABSTRACT:
The invention is intended for commercializing a pattern transfer process using a graytone mask, wherein the mask has a graytone part constituted of a minute opaque pattern of a size smaller than a resolution limit of an aligner using a graytone mask. For example, a contour pattern30is formed in an area close to a graytone part3along a contour pattern of an opaque pattern1adjacent to the graytone part3.

REFERENCES:
patent: 20030077522 (2003-04-01), Imura
patent: 20030186130 (2003-10-01), Nakayama
Technical Report of FPD Intelligence 1999.

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