Gray scale mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask

Reexamination Certificate

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C349S187000

Reexamination Certificate

active

07871743

ABSTRACT:
A gray scale mask for fabricating a thin film transistor, comprising: a source mask region; a drain mask region; and a channel mask region between the source mask region and the drain mask region, wherein a plurality of light-blocking bars are arranged regularly in the channel mask region, and the light-blocking bars are perpendicular to a center line of the channel mask region.

REFERENCES:
patent: 6653028 (2003-11-01), Lee et al.
patent: 6876428 (2005-04-01), Kwak et al.
patent: 2005/0074677 (2005-04-01), Laidig et al.
patent: 2007/0037070 (2007-02-01), Ohnuma et al.

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