Gray level imaging masks and methods for encoding same

Details Gray level imaging masks and methods for encoding same Gray level imaging masks and methods for encoding same

1994-06-17

1996-07-23

Rosasco, S.

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

430321, 430322, 430323, 216 41W, G03F 900

Patent

active

055388175

ABSTRACT:
Transparent and wholly transmissive optical plates are disclosed in which features to be ablated are formed to produce varying levels of transmission of an ablating laser beam, preferably scanned across the plate. Use of the plate for ablation extends to forming openings of varying depths with timed ablating exposures of known intensity. Alternately, the ablation profile of a single image can be controlled utilizing a timed exposure of known intensity to provide an ablated opening of a specific designed profile in a workpiece. Three specific plate image constructions are illustrated. These include gratings which taper in width (continuous and step tapers both being disclosed), randomly placed diffracting elements which taper in density, and gratings having interrupted portions which taper in density. Where the intensity across a feature is uniform, ablation to controlled depths may occur. Where the intensity across a feature is non-uniform and varies, ablation of apertures having variable controlled profiles may occur. Plates of this construction have utility with techniques for producing apertures with designed profile.

REFERENCES:
patent: 5254202 (1993-10-01), Kaplan
patent: 5286584 (1994-02-01), Fenmink et al.
patent: 5328785 (1994-07-01), Smith et al.

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