Grating patch arrangement, lithographic apparatus, method of...

Details Grating patch arrangement, lithographic apparatus, method of... Grating patch arrangement, lithographic apparatus, method of...

2006-09-26

2006-09-26

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C356S399000, C356S400000, C355S067000, C355S071000

Reexamination Certificate

active

07113255

ABSTRACT:
In one configuration of an arrangement according to an embodiment of the invention, a first grating patch on one module is aligned with a first grating patch on another module. In a different configuration of the arrangement, a second grating patch on the one module is aligned with a second grating patch on the other module. The two configurations are not aligned at the same time.

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European Search Report for Application No.: EP 04 07 8406, dated Apr. 26, 2005.

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