Grating interference type optical encoder

Details Grating interference type optical encoder Grating interference type optical encoder

2007-08-21

2007-08-21

Chowdhury, Tarifur (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

11416889

ABSTRACT:
A grating interference type optical encoder has a scale board, a diffraction grating located on the scale board, a light receiving element, an illumination optical system for emitting a coherent light fluxes to the diffraction grating on the scale board that relatively moves, to produce two diffraction light fluxes having different orders, an arc-shaped grating for re-emitting to the diffraction grating the two diffraction light fluxes having the different orders which are produced in the diffraction grating portion through a deflection unit, and a light guiding unit for superimposing rediffraction light fluxes produced by rediffracting the diffraction light fluxes re-emitted to the diffraction grating and guiding the superimposed rediffraction light fluxes to the light receiving element. The grating interference type optical encoder further includes: a phase grating that divides the rediffraction light fluxes superimposed between the diffraction grating and the light receiving element into a plurality of light fluxes, and a linear deflection element having different deflection directions corresponding to the plurality of light fluxes divided by the phase grating.

REFERENCES:
patent: 6075600 (2000-06-01), Nagano et al.
patent: 6570660 (2003-05-01), Ishizuka et al.
patent: 6958469 (2005-10-01), Ishizuka
patent: 7061624 (2006-06-01), Ishizuka
patent: 2002/0021448 (2002-02-01), Ishizuka et al.
patent: 8-327401 (1996-12-01), None
patent: 2001-336952 (2001-12-01), None
European Patent Office Search Report of European Patent Application No. 03 25 8231, dated May 18, 2004 (4 pages).

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