Grating interference type optical encoder

Details Grating interference type optical encoder Grating interference type optical encoder

2006-06-13

2006-06-13

Pham, Hoa Q. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S494000, C356S521000

Reexamination Certificate

active

07061624

ABSTRACT:
Provided is a grating interference type optical encoder including a scale board, a diffraction grating located on the scale board, a light receiving element, an illumination optical system for emitting a coherent light fluxes to the diffraction grating on the scale board that relatively moves, to produce two diffraction light fluxes having different orders, an arc-shaped grating for re-emitting to the diffraction grating the two diffraction light fluxes having the different orders which are produced in the diffraction grating portion through a deflection unit, and a light guiding unit for superimposing rediffraction light fluxes produced by rediffracting the diffraction light fluxes re-emitted to the diffraction grating and guiding the superimposed rediffraction light fluxes to the light receiving element. The grating interference type optical encoder further includes: a phase grating that divides the rediffraction light fluxes superimposed between the diffraction grating and the light receiving element into a plurality of light fluxes, and a linear deflection element having different deflection directions corresponding to the plurality of light fluxes divided by the phase grating.

REFERENCES:
patent: 6570660 (2003-05-01), Ishizuka et al.
patent: 2002/0021448 (2002-02-01), Ishizuka et al.
patent: 8-327401 (1996-12-01), None
patent: 2001-336952 (2001-12-01), None
European Patent Office; “European Search Report”; of corresponding European Patent Application No. EP 03 25 8231; dated May 18, 2004; (4 pages).

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