Grating-interference type displacement meter apparatus

Details Grating-interference type displacement meter apparatus Grating-interference type displacement meter apparatus

1989-12-12

1991-07-30

Willis, Davis L.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

G01B 902

Patent

active

050355074

ABSTRACT:
A grating-interference type displacement meter apparatus is disclosed wherein a convex lens or a concave mirror is disposed such that a focal point thereof is placed on a refraction plane or a diffraction plane of a diffraction grating, or wherein zeroth-order beams transmitted through the diffraction grating are reflected back in the same direction by a rectangular prism or a triangular prism for reentrance thereof onto the diffraction grating. Hereby, a plurality of optical beams produced by the diffraction grating are directed to propagate parallely to directions of propagation thereof defined in its design.

REFERENCES:
patent: 4629886 (1986-12-01), Akiyama et al.
patent: 4676645 (1987-06-01), Taniguchi et al.
patent: 4930895 (1990-06-01), Nishimura et al.
patent: 4979826 (1990-12-01), Ishizuka et al.

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