Grated landing area to eliminate sticking of micro-mechanical de

Details Grated landing area to eliminate sticking of micro-mechanical de Grated landing area to eliminate sticking of micro-mechanical de

1994-03-31

1997-09-09

Prenty, Mark V.

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

257629, 257773, H01L 2714

Patent

active

056659970

ABSTRACT:
A digital micro-mirror device (10), whose contacting elements (11, 17) are not prone to stick together. In the case of a deflecting mirror device, landing electrodes (17) are covered with a grating (19), which reduces the contacting area but still permits conduction between the mirror (11) and the landing electrode (17). Alternatively, the landing electrode (17) can be fabricated as a grated surface.

REFERENCES:
patent: 4209349 (1980-06-01), Ho et al.
patent: 4256514 (1981-03-01), Pogge
patent: 4358340 (1982-11-01), Fu
patent: 4502914 (1985-03-01), Trumpp et al.
patent: 4707218 (1987-11-01), Giammarco et al.
patent: 4803181 (1989-02-01), Buchmann et al.

Affiliated with

Also associated with

Rating

Grated landing area to eliminate sticking of micro-mechanical de does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Grated landing area to eliminate sticking of micro-mechanical de, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Grated landing area to eliminate sticking of micro-mechanical de will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-72124