Graphite susceptor structure for inductively heating semiconduct

Details Graphite susceptor structure for inductively heating semiconduct Graphite susceptor structure for inductively heating semiconduct

1974-11-15

1976-09-14

Bartis, A.

Electric heating

Metal heating

Of cylinders

13 1, 118 495, 118500, 148175, 165135, 219 1067, 427 45, H05B 508, C23C 1308, B05C 1302

Patent

active

039808548

ABSTRACT:
A susceptor for heating a plurality of semiconductor wafers, as by rf induction, comprises a hollow truncated pyramid of conventional graphite. The walls of the pyramid are planar except for ledges extending from the outer surfaces of the walls for supporting the wafers. A heat shield of pyrolytic graphite is fixed to the inner surface of the walls, directly behind each of the supported wafers. The heat shield has an area substantially coextensive and in alignment with the area of the wafer. The heat shields are anisotropic and are disposed with their low heat conducting directions extending in directions transversely to the surfaces of the walls so that the portions of the walls sandwiched between the wafers and the heat shields get hotter than the remaining portions of the walls.

REFERENCES:
patent: 2471128 (1949-05-01), Stein
patent: 2729556 (1956-01-01), Fontana
patent: 2884467 (1959-04-01), Denison et al.
patent: 3096083 (1963-07-01), Keon
patent: 3180917 (1965-04-01), Morrison et al.
patent: 3226465 (1965-12-01), Downing et al.
patent: 3539759 (1970-11-01), Spiro et al.
patent: 3549847 (1970-12-01), Clark et al.
patent: 3633537 (1972-01-01), Howe
patent: 3754110 (1973-08-01), Van Dongen et al.
patent: 3845738 (1974-11-01), Berkman et al.
"Vertical Barrel Epitaxial Susceptor," by Bratter et al., IBM Technical Disclosure Bulletin, June 1973, vol. 16, No. 1, p. 4.

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