Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus
Reexamination Certificate
2007-08-21
2007-08-21
Hiteshaw, Felisa (Department: 1722)
Single-crystal, oriented-crystal, and epitaxy growth processes;
Apparatus
C117S013000, C117S019000, C117S020000
Reexamination Certificate
active
10516347
ABSTRACT:
The present invention discloses a graphite heater for producing a single crystal used when producing a single crystal by the Czochralski method which comprises at least a terminal part to which electric current is supplied and a cylindrical heat generating part by resistance heating and are provided so as to surround a crucible for containing a raw material melt wherein the heat generating part has heat generating slit parts formed by being provided with upper slits extending downward from the upper end and lower slits extending upwards from the lower end by turns, and a length of at least one slit of the upper slits differs from others and/or a length of at least one slit of the lower slits differs from others so that a heat generating distribution of the heat generating part may be changed. Thereby, there can be provided a graphite heater for producing a single crystal which makes it possible to produce a silicon single crystal with high productivity when the silicon single crystal is pulled in a predetermined defect-free region or a predetermined defect region.
REFERENCES:
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patent: A 9-227286 (1997-09-01), None
patent: A 2000-53486 (2000-02-01), None
patent: WO97/21853 (1997-06-01), None
Voronkov, “The Mechanism of Swirl Defects Formation in Silicon,” Journal of Crystal Growth, vol. 59, No. 3, pp. 625-643, 1982.
Dupret et al., “Global modeling of heat transfer in crystal growth furnaces,” Int. J. Heat Mass. Transfer, vol. 33, No. 9, pp. 1849-1871, 1990.
Vizman et al., “Three-dimensional numerical simulation of thermal convection in an industrial Czorchralski melt: comparison to experimental results,” Journal of Crystal Growth 233, pp. 687-698, 2001.
Fusegawa Izumi
Iida Makoto
Sakurada Masahiro
Soeta Satoshi
Hiteshaw Felisa
Oliff & Berridg,e PLC
Shin-Etsu Handotai & Co., Ltd.
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