Graphite flash evaporator having at least one intermediate layer

Details Graphite flash evaporator having at least one intermediate layer Graphite flash evaporator having at least one intermediate layer

1994-09-28

1996-02-27

Owens, Terry J.

Electric resistance heating devices

Heating devices

Vaporizer

118726, 432264, C23C 1426

Patent

active

054955505

ABSTRACT:
A flash evaporator vaporization vessel for flash evaporating metal under conditions of repeated thermal cycling having a graphite body, an outer layer of pyrolytic boron nitride and an intermediate layer of a material selected from the group consisting of pyrolytic graphite, boron carbide (B.sub.4 C), tantalum carbide, and silicon carbide and having a thickness of no greater than about 0,002 inches.

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patent: 4112290 (1978-09-01), Nakajima et al.
patent: 4264803 (1981-04-01), Shinko
patent: 4446357 (1984-05-01), Barshter
patent: 4773852 (1988-09-01), Tanji et al.
patent: 5158750 (1992-10-01), Finicle
patent: 5239612 (1993-08-01), Morris
patent: 5343022 (1994-08-01), Gilbert, Sr. et al.
IBM Technical Disclosure Bulletin vol. 27 No. 1A Jun. 1984 Cosgrove, J. F. et al. Titanium Evaporation Source.

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