Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Patent
1991-07-03
1993-08-03
Reynolds, Bruce A.
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
219552, 392416, 392418, 118725, 118728, 338333, H01L 2120, H01L 21324
Patent
active
052331636
ABSTRACT:
A heating apparatus for use in heating a substrate comprises an electric heater and a power supply part. The electric heater is made up of an approximately columnar body which is made of graphite, and this columnar body has a top with a flat surface part on which the substrate is placed and a pair of legs which extend downwardly from the flat surface part. The legs are defined by an opening in the columnar body. The power supplying part is coupled to the electric heater and supplies a voltage across the legs of the columnar body so that a current flows from one leg to the other, thereby generating heat at the flat surface part to heat the substrate.
REFERENCES:
patent: 3042494 (1962-07-01), Gutsche
patent: 3220380 (1965-11-01), Schaarschmidt
patent: 3351742 (1967-11-01), Harris
patent: 3436255 (1969-04-01), Harris et al.
patent: 3820935 (1974-06-01), Dietze
patent: 4724621 (1988-02-01), Hobson et al.
patent: 4825809 (1989-05-01), Mieno
patent: 4938815 (1990-07-01), McNeilly
patent: 4978567 (1990-12-01), Millen
Furumura Yuji
Mieno Fumitake
Miyata Hiroshi
Tsukune Atsuhiro
Fujitsu Limited
Jeffery John A.
Reynolds Bruce A.
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