Graphics engine for high precision lithography

Details Graphics engine for high precision lithography Graphics engine for high precision lithography

2007-11-27

2007-11-27

Grant, II, Jerome (Department: 2626)

Image analysis

Image enhancement or restoration

Edge or contour enhancement

C382S190000, C382S195000, C382S202000, C382S209000, C382S289000

Reexamination Certificate

active

09954721

ABSTRACT:
The present invention includes a method to use a phase modulating micromirror array to create an intensity image that has high image fidelity, good stability through focus and good x-y symmetry. Particular aspects of the present invention are described in the claims, specification and drawings.

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