Semiconductor device manufacturing: process – Repair or restoration
Patent
1997-10-29
1999-08-10
Niebling, John F.
Semiconductor device manufacturing: process
Repair or restoration
438 15, 438 17, 438 18, H01L 2100
Patent
active
059372699
ABSTRACT:
A Process for graphically assisting the partial repair of defective MCM TF wiring nets. The process comprises the steps of inserting the wiring layer of the thin-film device in a tester, scanning the wiring layer of the thin-film device with the tester, identifying defects in the wiring nets, prioritizing the defects based on a function of each of the defective wiring nets, and repairing the defects based on priority.
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Bartley Gerald K.
Franklin Peter A.
Mele Carmine J.
Merryman Arthur G.
Pennacchia John R.
International Business Machines - Corporation
Murphy John
Niebling John F.
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