Graphical user interface for compliance monitoring in...

Details Graphical user interface for compliance monitoring in... Graphical user interface for compliance monitoring in...

2005-10-18

2005-10-18

Rodriguez, Paul (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S029000, C700S099000, C700S121000, C705S002000

Reexamination Certificate

active

06957114

ABSTRACT:
A system and method is disclosed for allocating multi-function resources among a plurality of tasks within a process system in semiconductor wafer fabrication. A resource allocator allocates multi-function resources among tasks within a process system that executes at least one application process. The resource allocator comprises a monitoring controller, model of the process system, a resource allocation controller, and a compliance-monitoring viewer. The compliance-monitoring viewer is operable to display process system information to illustrate plan compliance, information visualized over a time period of years, months, days, hours, seconds, microseconds or the like.

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