Graphical representation of a wafer processing process

Details Graphical representation of a wafer processing process Graphical representation of a wafer processing process

2005-12-13

2005-12-13

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Article handling

C345S440000, C715S772000, C414S222010

Reexamination Certificate

active

06975921

ABSTRACT:
A method for graphically representing the progress of wafers being processed in a plurality of process stations is disclosed. In one step, the start of a process performed on the wafers in one of the plurality of process stations is determined. Then, the generation of a first line segment parallel to a first axis is initiated. Next, the end of the process in one of the plurality of process stations is determined. Then the generation of the first line segment parallel to the first axis is terminated. The start of a transfer of the wafers from one of the plurality of process stations to another one of the plurality of process stations is detected in a next step. Then, the formation of a second line segment connected with the first line segment and substantially perpendicular to the first axis is initiated. The completion of the transfer of the wafers is then determined and the formation of the second line segment perpendicular to the first axis is terminated. The process is then repeated for each process station until the wafers have been processed through all the process stations.

REFERENCES:
patent: 5818716 (1998-10-01), Chin et al.
patent: 5852445 (1998-12-01), Yoshikawa et al.
patent: 5880980 (1999-03-01), Rothacher et al.
patent: 6099598 (2000-08-01), Yokoyama
patent: 6230068 (2001-05-01), Wu et al.
patent: 6587108 (2003-07-01), Guerlain et al.

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