Graphical display discriminant factor indicator for anomaly iden

Details Graphical display discriminant factor indicator for anomaly iden Graphical display discriminant factor indicator for anomaly iden

1994-07-06

1995-09-12

Envall, Jr., Roy N.

Boots, shoes, and leggings

395119, G06F 1760

Patent

active

054503264

ABSTRACT:
A graphics display tool facilitates analysis of product data, to determine at what point or points in a batch manufacturing process sequence the cause of a defective device has occurred. The tool compiles and displays data associated with respective nodes of a multi-node sequential flow semiconductor batch manufacturing process, in the form of easily perceived visual indicators, in particular weighted lines that interconnect successive nodes of the process graphically represented by means of a parallel coordinate system. The use of discriminant level-based visual indicator links of the graphics display according enables a system analyst to readily identify a node that is a likely candidate for either the cause of an anomaly that has contributed to a failed wafer, or to identify a node that is likely not to have contributed to a failed wafer.

REFERENCES:
patent: 4873623 (1989-10-01), Lane et al.
patent: 5257345 (1993-10-01), Malm

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