Granular magnetic thin film and method for making the same,...

Stock material or miscellaneous articles – Magnetic recording component or stock – Thin film media

Reexamination Certificate

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Reexamination Certificate

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07060374

ABSTRACT:
There are provided a magnetic thin film utilizing a granular film and having excellent high frequency characteristics and a method of manufacturing the same, and a multilayered magnetic film and magnetic components and electronic equipment utilizing the same.A nonreactive sputtering is performed so that there is no oxidation of a magnetic metal, and a saturation magnetization is increased to increase a resonant frequency of permeability. Also, a multi-target simultaneous sputtering is combined with the nonreactive sputtering so that in a granular structure including magnetic grains and an insulating layer a size of the magnetic grains and a thickness of the insulating layer are optimized thereby ensuring a proper magnitude for a crystalline magnetic anisotropy within the grains and excellent soft magnetic properties. Further, the optimization of the thickness of the insulating layer has the effect of improving a resistivity, decreasing an eddy current and improving an exchange interaction between the magnetic grains.

REFERENCES:
patent: 6630255 (2003-10-01), Litvinov et al.
patent: 9-50618 (1997-02-01), None
patent: 9-82522 (1997-03-01), None
patent: 10-270246 (1998-10-01), None
patent: 2000-150233 (2000-05-01), None
patent: 2000-340425 (2000-12-01), None
Merriam Webster's Collegiate Dictionary, Tenth Edition, p. 607.

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