Stock material or miscellaneous articles – All metal or with adjacent metals – Having composition – density – or hardness gradient
Reexamination Certificate
2008-07-22
2011-10-25
Silverman, Stanley (Department: 1736)
Stock material or miscellaneous articles
All metal or with adjacent metals
Having composition, density, or hardness gradient
C428S701000, C428S702000, C428S547000, C428S548000, C505S191000, C505S230000, C505S238000, C505S473000, C505S701000, C427S062000, C427S255190, C252S520210, C423S594120
Reexamination Certificate
active
08043716
ABSTRACT:
Disclosed herein is a gradient thin film, formed on a substrate by simultaneously depositing different materials on the substrate using a plurality of thin film deposition apparatuses provided in a vacuum chamber, wherein the gradient thin film is formed such that the composition thereof is continuously changed depending on the thickness thereof by deposition control plates provided in the path through which the different materials move to the substrate. The gradient thin film is advantageous in that the thin film is formed by simultaneously depositing different materials using various deposition apparatuses, so that the composition thereof is continuously changed depending on the thickness thereof, with the result that the physical properties of a thin film are easily controlled and the number of deposition processes is decreased, and thus processing time and manufacturing costs are decreased, thereby improving economic efficiency.
REFERENCES:
patent: 6258459 (2001-07-01), Noguchi et al.
patent: 01-129962 (1989-05-01), None
patent: 04-218660 (1992-08-01), None
patent: 06-212410 (1994-08-01), None
patent: 100795063 (2008-01-01), None
Ha Dong Woo
Ha Hong Soo
Kim Ho Sup
Kim Tae Hyung
Ko Rock Kil
Korea Electrotechnology Research Institute
Park & Associates IP Law P.C.
Silverman Stanley
Vijayakumar Kallambella
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