Gradient doping in amorphous silicon

Batteries: thermoelectric and photoelectric – Photoelectric – Cells

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136258, 148188, 204192S, 204192P, 357 2, 357 15, 357 30, C23C 1500, H01L 3104

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042512891

ABSTRACT:
An amorphous silicon semiconductor having a gradient doping profile is produced by thermo-electrically diffusing an ionizable deposit material such as antimony or aluminum, for example, into the amorphous silicon layer. Embodied in a photovoltaic device, the gradient doping profile increases the width of the depletion or barrier region and concurrently ensures an ohmic contact between amorphous silicon and current carrying electrodes.

REFERENCES:
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patent: 4177474 (1979-12-01), Ovshinsky
patent: 4178415 (1979-12-01), Ovshinsky et al.
T. D. Moustakas, "Sputtered Hydrogenated Amorphous Silicon", J. Electronic Materials, vol. 8, pp. 391-435 (1979).
M. J. Thompson et al., "RF Sputtered Amorphous Silicon Solar Cells", Proceedings Int'l. Photovoltaic Solar Energy Conf., Luxembourg, (1977), pp. 231-240.
M. H. Brodsky et al., "Doping of Sputtered Amorphous Semiconductors", IBM Tech. Disc. Bull., vol. 19, pp. 4802-4803 (1977).
P. M. Martin et al., "Property-Composition Relationships in Sputter-Deposited A-Si:H Alloys", Solar Energy Materials, vol. 2, pp. 143-157, (1979/1980).

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