Active solid-state devices (e.g. – transistors – solid-state diode – Heterojunction device – Bipolar transistor
Patent
1991-11-13
1994-10-04
Prenty, Mark V.
Active solid-state devices (e.g., transistors, solid-state diode
Heterojunction device
Bipolar transistor
257191, 257197, 257591, 257616, 437128, 437131, H01L 29161, H01L 2972
Patent
active
053529120
ABSTRACT:
A heterojunction bipolar transistor having a single-crystal emitter with reduced charge storage and acceptable current gain is described herein. The heterojunction transistor comprises a collector region, a base region formed on the collector region, and a single-crystal emitter region grown on the base region by low temperature epitaxy. During the formation of the base region, a graded profile of 5-23% germanium is added to the base, as the distance to the collector region decreases, thereby decreasing the base bandgap as it approaches the collector region. Further, during the formation of the emitter region, a graded profile of 0-20% germanium is added to the emitter as the distance from the emitter-base junction increases. Thus, the emitter bandgap decreases as it moves farther from the emitter-base junction. The result of the above grading profiles is that the emitter bandgap is narrower at the emitter contact than the base bandgap at the emitter-base junction.
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H. Temkin, J. C. Bean, A. Antreasyan, and R. Leigbenguth, "Ge.sub.x SI.sub.1-x Strained-Layer Heterostructure Bipolar Transistors", AT&T Bell Laboratories, Murray Hill, NJ 07974, accepted for Publication Jan. 29, 1988.
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-Si Double-Heterojunction Bipolar Transistors", Dept. of Physics, Linkoping University, S-581 83 Linkoping, Sweden, Accepted for Publication Jan. 20, 1989.
Gary L. Patton, James H. Comfort, Bernard S. Meyerson, Emmanuel F. Crabbe, Gerald J. Scilla, Edouard De Fresart, Johannes M. C. Stork, Jack Y.-C. Sun, David L. Harame, Joachim N. Burghartz, "75-GHzft SiGe-Base Heterojunction Bipolar Transistors", IEEE Electrical Device Letters, vol. 11, No. 4, Apr. 1990.
Crabbe Emmanuel F.
Harame David L.
Meyerson Bernard S.
Patton Gary
Stork Johannes M. C.
International Business Machines - Corporation
Prenty Mark V.
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