Coating processes – Coating by vapor – gas – or smoke – Metal coating
Patent
1984-03-27
1987-10-27
Childs, Sadie L.
Coating processes
Coating by vapor, gas, or smoke
Metal coating
20419215, 20419225, 427124, 427125, 427255, C23C 1606
Patent
active
047029412
ABSTRACT:
A one step metallization is disclosed for applying a layer of gold or gold alloy to the back of a silicon substrate to facilitate bonding that substrate to a metallized package member. The gold is applied to the substrate, for example by evaporation, while the substrate is maintained at a temperature between about 200.degree. C. and about 360.degree. C. Following the deposition the substrate is quickly cooled to room temperature. The thickness of the gold layer and the deposition temperature are adjusted to insure that the silicon diffusion profile is contained within the gold film during deposition. This insures good adhesion of the gold to the silicon substrate and provides a pure gold surface layer necessary for optimum bonding of the semiconductor substrate to a metallized package portion.
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Johnson Barry C.
Mitchell Curtis W.
Childs Sadie L.
Fisher John
Motorola Inc.
Warren Raymond J.
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