Optics: measuring and testing – By dispersed light spectroscopy – With sample excitation
Reexamination Certificate
2007-07-10
2007-07-10
Evans, F. L. (Department: 2877)
Optics: measuring and testing
By dispersed light spectroscopy
With sample excitation
Reexamination Certificate
active
11220033
ABSTRACT:
The invention provides a glow discharge optical emission spectrometer for intermittently applying a high frequency voltage to a sample and obtaining a measured value from a spectroscope in synchronization with a timing of a unit of application during intermittent application. The obtaining of measured values in which is introduced noise at a non-application time during intermittent application is prevented, and by applying a high voltage value to the sample with a minimized adverse effect on a voltage application to the sample, high-level measured values are obtained. By obtaining a measured value a plural number of times during a unit of application, a large number of measured values are obtained in a short period of time, resulting in a reduction in measurement time.
REFERENCES:
patent: 11-326217 (1999-11-01), None
patent: 2001-004548 (2001-01-01), None
Wagatsuma, K, “Improvement of the Information Depth in In-Depth Analysis By Radio-Analysis By Radio-Frequency-Powered Glow Discharge Optical Emission Spectrometry”, ISIJ INTERNATIONAL, vol. 42, 2002, pp. S87-S92.
Wagatsuma, K, Application of Pulsed Voltage to D.C. Glow Discharge Plasma for Controlling the Sputtering Rate in Glow Discharge Optical Emission Spectrometry, ISIJ INTERNATIONAL, vol. 44, 2004, pp. 108-114.
Wagatsuma, K, Application of DC Voltage Modulation Technique to the Determination of Phosphorous and Sulfur in Steel Samples in Glow Discharge Optical Emission Spectrometry, ISIJ INTERNATIONAL, vol. 40, pp. 783-788.
Wagatsuma et al., Enhancement Factor in the Emission Intensities Excited by Radiofrequency-powered Glow Discharge Plasma Associated with Bias-current Introduction, ISIJ INTERNATIONAL, vol. 41, 2001, pp. 1488-1493.
Evans F. L.
Horiba Ltd.
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