Glow discharge method of applying a carbon coating onto a substr

Details Glow discharge method of applying a carbon coating onto a substr Glow discharge method of applying a carbon coating onto a substr

1984-09-10

1987-05-05

Pianalto, Bernard D.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

B05D 306

Patent

active

046631836

ABSTRACT:
Disclosed is a method of forming a hard, carbonaceous film on a substrate and the hard carbonaceous film formed thereby. The hard carbonaceous film is formed by decomposing a gaseous hydrocarbon having carbon atoms tetrahedrally coordinated to carbon nearest neighbors through carbon-carbon single bonds. The gaseous hydrocarbon is decomposed in a radio frequency maintained plasma and the plasma decomposition products are deposited on a cathodic substrate. Optionally, fluorocarbons may be present in a decomposition gas.

REFERENCES:
patent: 4382100 (1983-05-01), Holland
patent: 4400410 (1983-08-01), Green et al.
patent: 4402993 (1983-09-01), Aisenberg et al.
patent: 4434188 (1984-02-01), Kamo et al.
patent: 4468413 (1984-08-01), Bachmann
patent: 4517223 (1985-05-01), Ovshinsky et al.
patent: 4522663 (1985-06-01), Ovshinsky et al.

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