Glow discharge method of applying a carbon coating onto a substr

Details Glow discharge method of applying a carbon coating onto a substr Glow discharge method of applying a carbon coating onto a substr

1986-09-17

1988-09-13

Kittle, John E.

Stock material or miscellaneous articles

Self-sustaining carbon mass or layer with impregnant or...

428412, 428457, 428500, 428691, 428696, 428917, 423445, B32B 900, B32B 2706, B32B 1504, C01B 3100

Patent

active

047709405

ABSTRACT:
Disclosed is a method of forming a hard, carbonaceous film on a substrate and the hard carbonaceous film formed thereby. The hard carbonaceous film is formed by decomposing a gaseous hydrocarbon having carbon atoms tetrahedrally coordinated to its nearest neighbors through carbon-carbon single bonds. The gaseous hydrocarbon is decomposed in a radio frequency maintained plasma and the plasma decomposition products are deposited on a cathodic substrate. Optionally, fluorocarbons may be present in a decomposition gas.

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Holland and Ojha, Thin Solid Films, 38 (1976) L17-19, 40 (1977) L31-L32, 48 (1978) L21-L23.

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