Glow discharge method and apparatus

Details Glow discharge method and apparatus Glow discharge method and apparatus

1977-05-31

1979-01-02

Mack, John H.

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

204298, 313153, 313161, 313210, 313217, 315267, C23C 1500

Patent

active

041326121

ABSTRACT:
A method and apparatus for providing a completely closed plasma trap in an r.f. type glow discharge system to enable enhanced sputtering from a pair of electrodes so that substrates may be suitably coated. The electrode pairs may be post type, hollow or planar, in various shapes with and without end wings. All configurations utilize a cooperating magnetic field, provided by field coils external or internal to the electrodes, the magnetic field being shaped to define with the electrodes at least one plasma containing trap having axial symmetry imposed by the magnetic field and/or the electrode structure. The trap may be defined by the pair of electrodes acting in concert with each other and the magnetic field, one or more traps may be defined separately by each electrode and the magnetic field, or both types of traps may exist simultaneously in a hybrid situation. Means are also disclosed for mounting, centering, cooling, assembling and making electrical contact with various of the electrode structures. Means are further disclosed for protecting various structural elements from undesired exposure to plasma, preventing conductive plating of insulators, due to undesired deposition of target material, and shielding the entire glow discharge system to prevent undesired r.f. radiation leakage to the surrounding environment.

REFERENCES:
patent: 3458426 (1969-07-01), Rausch et al.
patent: 3616450 (1971-10-01), Clarke
patent: 3728246 (1973-04-01), Barkhudarov et al.
J. R. Mullaly, "Crossed Field Discharge Device for High Rate Sputtering", Research/Development, Feb. 1971, pp. 40, 42, 44.

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