Glow discharge fabrication of transparent conductive coatings

Details Glow discharge fabrication of transparent conductive coatings Glow discharge fabrication of transparent conductive coatings

1978-09-11

1981-02-24

Newsome, John H.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427109, 427162, 427164, 427166, B05D 306

Patent

active

042528380

ABSTRACT:
Optically transparent, conducting metal oxide films are produced on plastic or suitable ceramic substrates by placing the substrate to be coated in a partially evacuated chamber containing a mixture of a suitable organo-metallic compound vapor and oxygen and utilizing a glow discharge sustained by a DC, AC or RF electromagnetic field.

REFERENCES:
patent: 3108900 (1963-10-01), Papp
patent: 3243363 (1966-03-01), Helwig
patent: 3424661 (1969-01-01), Androshuk
patent: 3458342 (1969-07-01), Cormia
patent: 3586533 (1971-06-01), Cubert et al.
patent: 3991228 (1976-11-01), Carlson et al.
patent: 4038439 (1977-07-01), Gibson et al.
Boord et al., Technical Report AFML-TR-76-116, pp. 14, 15 and 39-46, Jul. 1976.
Air Force Materials Laboratory, Nonmetallic Materials Division, Elastomers and Coatings Branch, AFML/MBE, Wright-Patterson AFB, Ohio 45433.

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