Optics: measuring and testing – By dispersed light spectroscopy – With sample excitation
Patent
1991-04-15
1992-01-07
Evans, F. L.
Optics: measuring and testing
By dispersed light spectroscopy
With sample excitation
356313, 356417, G01N 2169
Patent
active
050784943
ABSTRACT:
A glow discharge chamber for a glow discharge emission spectrometer has a housing with a cavity. The cavity has a gas inlet and a gas outlet. The gas outlet is adapted to be connected to a vacuum pump to produce flow of gas through the cavity. An anode is located within the cavity adjacent to the gas outlet. A cathode is located in the cavity and gas within the cavity emits negative glow radiation adjacent to the cathode when a voltage differential between the anode and cathode exists. A radiation transmissive, gas retaining window in the housing through which negative glow radiation passes from the cavity to one or more radiation sensors for spectral analysis. The flow of gas through the cavity channels sputtered cathode oxides away from the window due to the cathode and anode arrangement in the cavity.
REFERENCES:
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patent: 4845041 (1989-07-01), Scuitto et al.
"Glow Discharge Optical Spectroscopy for Monitoring Sputter Deposited Film Thickness", J. Vac Sci Techno., vol. 10, No. 6, pp. 1144-1149, Green et al.
"Glow Discharge Optical Spectroscopy Measurement of Dopant Concentration in a-Si:H*", J. of Non-Crystalline Solids, 35 & 36, pp. 273-277, Zetch et al.
"New Method of Respiratory Gas Analysis: Light Spectrometer", American Physiological Society, 1985, Robert B. Fraser and Stephen Z. Turney.
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Greene et al., J. Vac. Sci. Technol., vol. 10, No. 6, Nov./Dec. 1973, pp. 1144-1149.
Zesch et al., Journal of Non-Crystalline Solids, 35 & 36 Jan.-Feb. 1980, pp. 273-277.
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