Glow discharge apparatus with squirrel cage electrode

Details Glow discharge apparatus with squirrel cage electrode Glow discharge apparatus with squirrel cage electrode

1982-03-26

1983-12-06

Lusignan, Michael R.

Coating apparatus

Gas or vapor deposition

118723, 118 501, 204164, C23C 1308

Patent

active

044186452

ABSTRACT:
In an r.f. glow discharge system, a plurality of hollow electrodes are positioned circumferentially about a central point forming a circular array or squirrel cage. A workpiece is supported within the squirrel cage and relative rotational movement between the squirrel cage and the workpiece is provided. A plurality of apertures are provided along the surface of each electrode and aligned toward the surface of the workpiece. Alternatively, each electrode may further consist of a pair of inner and outer hollow tubes each with a plurality of apertures along its length with the apertures of the inner tube being adjacent to and spaced from the apertures of the outer tube but offset therefrom. The arrangement is best suited for a cylindrically shaped workpiece, e.g., a photoreceptor drum.

REFERENCES:
patent: 4262631 (1981-04-01), Kubacki

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