Glass switching device using an ion impermeable glass active lay

Details Glass switching device using an ion impermeable glass active lay Glass switching device using an ion impermeable glass active lay

1975-07-15

1977-09-20

Edlow, Martin H.

Communications: electrical

Land vehicle alarms or indicators

Internal alarm or indicator responsive to a condition of the...

357 4, 357 23, 357 61, 340173R, H01L 4500

Patent

active

040500829

ABSTRACT:
A glass electronic switching device having improved long-term reliability comprises a thin layer of an ion impermeable glass disposed between a pair of electrical contacts. Preferably the glass is an insulating glass having a thermal coefficient of expansion compatible with typical crystalline semiconductors, and the glass layer typically has a thickness of less than about five microns. These glass switches can be readily incorporated into high-density integrated circuits using planar techniques. When sufficiently thin glass layers are used, the same glass layer which comprises the active layer of the switching device can also comprise a masking layer to facilitate the fabrication of conventional diffused junction devices, a dielectric layer for the fabrication of surface effect devices, and a passivating layer to protect an underlying crystalline semiconductor substrate.

REFERENCES:
patent: 3241009 (1966-03-01), Dewald
patent: 3271591 (1966-09-01), Ovisinsky
patent: 3440588 (1969-04-01), Drake
patent: 3611063 (1971-10-01), Neale
patent: 3679947 (1972-07-01), Chakravertz
patent: 3699543 (1972-10-01), Neale
patent: 3827073 (1974-07-01), Mize
Kinoshita et al., Japan J. Appl. Physics, 9, No. 4, (1970) p. 411.

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