Glass member resistant to plasma corrosion

Details Glass member resistant to plasma corrosion Glass member resistant to plasma corrosion

2006-03-21

2006-03-21

Group, Karl (Department: 1755)

Compositions: ceramic

Ceramic compositions

Glass compositions, compositions containing glass other than...

C501S069000

Reexamination Certificate

active

07015163

ABSTRACT:
It is an object of the present invention to provide a glass member resistant against plasma corrosion suitably used as a jig material in producing semiconductors, which exhibits excellent resistance against plasma corrosion, and which is free from the generation of particles. The above problem is solved by a glass member resistant to plasma corrosion, comprising a portion to be exposed to plasma gas, which is made of a glass material containing, as the essential component, one compound component selected from the group consisting of compounds expressed by one of the chemical formulae SiO2—Al2O3—CaO, SiO2—Al2O3—MgO, SiO2—BaO—CaO, SiO2—ZrO2—CaO, SiO2—TiO2—BaO, provided that the constitution ratio of the compound components is within the vitrification range.

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Kirk Othmer, “Encyclopedia of Chemical Technology” Third Edition, vol. 11, 1989.

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