Glass lead seal test apparatus

Measuring and testing – With fluid pressure – Leakage

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Details

73 493, G01M 320

Patent

active

043567215

ABSTRACT:
Glass lead seal test apparatus in which a multiplicity of microcircuit pages with the leads sealed relative thereto by glass are checked for leakage between the glass seals and the microcircuit package structure and relative to the leads; this is accomplished by providing an apparatus for evacuating a chamber of the microcircuit packages and a chamber of the apparatus, and then injecting helium into the chamber of the apparatus and then utilizing test structure to test leakage around the glass seals if a perfect seal is not present. The device is designed to handle a multiplicity of microcircuit packages during a given test cycle.

REFERENCES:
patent: 3416359 (1968-12-01), Durbin et al.
patent: 3762212 (1973-10-01), Morley et al.
patent: 3914983 (1975-10-01), Umezu
patent: 4158960 (1980-06-01), White et al.

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