Glass header structure for a semiconductor pressure transducer

Details Glass header structure for a semiconductor pressure transducer Glass header structure for a semiconductor pressure transducer

1987-11-23

1988-08-16

Goldberg, E. A.

Electrical resistors

Strain gauge type

338 4, 338 5, 296311, G01L 122

Patent

active

047647477

ABSTRACT:
A glass header structure for a pressure transducer employs a cylindrical member fabricated from a borosilicate glass having a thermal expansion coefficient which matches silicon. The glass header has a central aperture which extends from the top to the bottom surface. Positioned about the central aperture are four smaller apertures located at 90 degree intervals and each containing an elongated terminal pin. The pins are of a nail head configuration with a flat top head of a larger diameter than the diameter of the apertures and of the main pin body. Affixed to the flat top surfaces of the terminal pins by means of ball bonding are wires which connect to the terminal areas of a semiconductor pressure transducer which is mounted over the central aperture of the header. In this manner, the glass header serves to electrically and mechanically isolate the semiconductor transducer from the external environment and to further provide isolation of the transducer from voltage and heating effects which are produced during the assembly process necessary to fabricate a complete transducer unit.

REFERENCES:
patent: 3654579 (1972-04-01), Kurtz et al.
patent: 3697917 (1972-10-01), Orth et al.
patent: 3817107 (1974-06-01), Shimada et al.
patent: 4019388 (1977-04-01), Hall, II et al.
patent: 4040297 (1977-08-01), Karsmakers et al.
patent: 4394711 (1983-07-01), Conley

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