Glass for a photomask

Details Glass for a photomask Glass for a photomask

1983-12-15

1985-02-26

Bell, Mark

Compositions: ceramic

Ceramic compositions

Glass compositions, compositions containing glass other than...

501 62, C03C 308, C03C 310

Patent

active

045018197

ABSTRACT:
According to one aspect of the invention, there is provided glass for a photomask consisting, in weight percent, of 45 to 62% SiO.sub.2, 3 to 15% B.sub.2 O.sub.3, 12 to 25% Al.sub.2 O.sub.3, 5 to 15% MgO, 0 to 5% CaO, 0 to 5% SrO, 0 to 5% BaO, 0 to 5% ZnO, 0.5 to 5% PbO, 0 to 20% La.sub.2 O.sub.3 +Gd.sub.2 O.sub.3 +Y.sub.2 O.sub.3, 0 to 1.5% Na.sub.2 O, 0 to 1.5% K.sub.2 O, 0 to 0.5% As.sub.2 O.sub.3 and 0 to 6% Sb.sub.2 O.sub.3. This glass is easy to melt and homogenize and has good resistivity to phase separation and excellent heat resisting and refractory properties, chemical durability, ultraviolet transmittance and metal vapor deposition property. According to another aspect of the invention, there is provided glass for a photomask consisting, in weight %, 45 to 60% SiO.sub.2, 0.5 to 12% B.sub.2 O.sub.3, 10 to 22% Al.sub.2 O.sub.3, 5 to 17% MgO, 0 to 5% CaO, 0 to 8% SrO, 1.5 to 15% BaO, 1.5 to 17% ZnO, 0.5 to 10% PbO, the total content of ZnO and PbO being at least 6%, 0 to 7% Ta.sub.2 O.sub.5 +Nb.sub.2 O.sub.5 +La.sub.2 O.sub.3 +Gd.sub.2 O.sub.3 +Y.sub.2 O.sub.3 +Bi.sub.2 O.sub.3 +WO.sub.3, 0 to 5% ZrO.sub.2 +TiO.sub.2, 0 to 2.5% Na.sub.2 O+K.sub.2 O+Li.sub.2 O, 0 to 0.5% As.sub.2 O.sub.3 and 0 to 0.5% Sb.sub.2 O.sub.3. This glass has the same excellent features as the first described glass and, in addition, has further improved melt properties.

REFERENCES:
patent: 3485644 (1969-12-01), Shonebarger
patent: 4319215 (1982-03-01), Yamazaki et al.
patent: 4391916 (1983-07-01), Nakagawa et al.
patent: 4403043 (1983-09-01), Nakagawa et al.

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