Glass-ceramics suitable for dielectric substrates

Compositions: ceramic – Ceramic compositions – Devitrified glass-ceramics

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501 5, 501 69, 501 73, C03C 1004, C03C 1008, C03C 3085, C03C 3062

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047146877

ABSTRACT:
This invention is directed to the production of glass-ceramic materials especially designed for substrates in integrated circuit packaging. The glass-ceramics can be prepared from thermally crystallizable glasses that can be sintered into an integral glass-ceramic having a dielectric constant less than 6 and containing willemite as the predominant crystal phase. The overall composition of the glass-ceramic consists essentially, in weight percent of 15-45% ZnO, 10-30% Al.sub.2 O.sub.3, and 30-55% SiO.sub.2. Where desired, a nucleating agent selected from the group consisting of 8-12% ZrO.sub.2 and 0.001-0.05% of a noble metal selected from the group consisting of Au, Pd, and Pt may be included.

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