Glass-ceramic dopant host for vapor phase transport of B.sub.2 O

Details Glass-ceramic dopant host for vapor phase transport of B.sub.2 O Glass-ceramic dopant host for vapor phase transport of B.sub.2 O

1975-06-18

1976-12-14

McCarthy, Helen M.

Compositions: coating or plastic

Coating or plastic compositions

Marking

148189, 427 85, 106 398, 106 54, C03C 322, H01L 21223, H01L 21383

Patent

active

039973514

ABSTRACT:
Disclosed is a method for diffusion doping of silicon and germanium semiconductors by the vapor phase transport of B.sub.2 O.sub.3 from a solid B.sub.2 O.sub.3 source to the silicon semiconductor, wherein the solid B.sub.2 O.sub.3 source comprises a rigid, dimensionally stable, glass-ceramic body containing at least about 10 mole percent of B.sub.2 O.sub.3 in the glassy phase, the crystalline phase, or both.

REFERENCES:
patent: 3489579 (1970-01-01), Steverding
patent: 3540895 (1970-11-01), Scheidler et al.
patent: 3841927 (1974-10-01), Florence et al.
patent: 3907618 (1975-09-01), Rapp

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