Pumps – Electrical or getter type
Patent
1997-04-11
2000-11-07
Thorpe, Timothy S.
Pumps
Electrical or getter type
417 51, F04B 3702
Patent
active
06142742&
ABSTRACT:
A getter pump module includes a number of getter disks provided with axial holes, and a heating element which extends through the holes to support and heat the getter disks. The getter disks are preferably solid, porous, sintered getter disks that are provided with a titanium hub that engages the heating element. A thermally isolating shield is provided to shield the getter disks from heat sources and heat sinks within the chamber, and to aid in the rapid regeneration of the getter disks. In certain embodiments of the present invention the heat shields are fixed, and in other embodiments the heat shield is movable. In one embodiment, a focus shield is provided to reflect thermal energy to the getter material from an external heater element and provide high pumping speeds. An embodiment of the present invention also provides for a rotating getter element to enhance getter material utilization.
REFERENCES:
patent: 2951156 (1960-08-01), Miller
patent: 2965218 (1960-12-01), Jayne
patent: 3203901 (1965-08-01), Della Porta
patent: 3316386 (1967-04-01), Yaffee et al.
patent: 3589953 (1971-06-01), Traxler
patent: 3603704 (1971-09-01), Zucchinelli et al.
patent: 3662522 (1972-05-01), Della Porta et al.
patent: 3780501 (1973-12-01), Porta et al.
patent: 3820919 (1974-06-01), Katz
patent: 3892650 (1975-07-01), Cuomo et al.
patent: 3926832 (1975-12-01), Barosi
patent: 3961897 (1976-06-01), Giorgi et al.
patent: 3961920 (1976-06-01), Gilbert
patent: 4062319 (1977-12-01), Roth et al.
patent: 4071335 (1978-01-01), Barosi
patent: 4095965 (1978-06-01), Neumann et al.
patent: 4133651 (1979-01-01), Hoy et al.
patent: 4137012 (1979-01-01), Della Porta et al.
patent: 4181161 (1980-01-01), Kraus
patent: 4197098 (1980-04-01), Stiehl et al.
patent: 4269624 (1981-05-01), Figini
patent: 4306515 (1981-12-01), Winkler
patent: 4306887 (1981-12-01), Barosi et al.
patent: 4312669 (1982-01-01), Boffito et al.
patent: 4405487 (1983-09-01), Harrah et al.
patent: 4428856 (1984-01-01), Boyarina et al.
patent: 4449373 (1984-05-01), Peterson et al.
patent: 4460673 (1984-07-01), Sukigara et al.
patent: 4515528 (1985-05-01), Young
patent: 4571158 (1986-02-01), Maegdefessel
patent: 4704301 (1987-11-01), Bauer et al.
patent: 4907948 (1990-03-01), Barosi et al.
patent: 5015226 (1991-05-01), Polaschegg
patent: 5172066 (1992-12-01), Succi et al.
patent: 5238469 (1993-08-01), Briesacher et al.
patent: 5242559 (1993-09-01), Giorgi
patent: 5254096 (1993-10-01), Rondelet et al.
patent: 5320496 (1994-06-01), Manini et al.
patent: 5340460 (1994-08-01), Kobayashi et al.
patent: 5357760 (1994-10-01), Higham
patent: 5772404 (1998-06-01), Carella et al.
Briesacher, J. et al., "Non-Evaporable Getter Pumps for Semiconductor Processing Equipment," Department of Electronics, Faculty of Engineering, Tohoku University, pp. 49-57.
della Porta, Paolo, "Gettering, an Integral Part of Vacuum Technology," American Vacuum Society 39th National Symposium, Nov. 9-13, 1992.
Briesacher et al., "Recommended Pumping Semiconductor Manufacturing", Kayoiku Kaikan, `Applications for Non-Evaporable Getter Pumps in Semiconductor Processing Equipment` 10th Symposium on ULSI Ultra Clean Technology, Nov. 9-10, 1989.
"SORB-AC.RTM. Getter Wafer Modules and Panels", S.A.E.S. Getters S.p.A. Italy, Oct. 1988.
Porta et al., "The Characteristics of Getter Pumps, Getter Ion Pumps and their Combination", SAES Technical Report TR (SAES Getter S.p.A.), pp. 3-4.
Lorimer et al., "Enhanced UHV Performance with Zirconium-Based Getters", Solid State Technology, pp. 3-5, Sep. 1990.
Ferrario et al., "Chemical Pumping and its Applications in High and Ultra High Vacuum", Le Vide, les Couches Minces-Supplement au n.degree. 252, May-Jul. 1990, pp. 105.
Farrario, B., "Use of Getters in Vacuum Systems-Extended Abstract", Vacuum, vol. 37, No. 3/4, pp. 375-377, 1987.
Sciuccati, F. et al., "In Situ Pumping with NEG (non-evaporable getters) during Vacuum Processing", Vacuum, vol. 38, Nos. 8-10, pp. 765-769, 1988.
Cecchi, J.L., "Impurity control in TFTR", Journal of Nuclear Materials, vol. 93 & 94, pp. 28-43, 1980.
Ferrario, B. "Non-Evapporable Getters in Plasma and Particle Physics Experiments", SAES Getters S.p.A., pp. 184-187, Bombay, India, 1983.
Ferrario et al., "New Types of Volume Gettering Panels for Vacuum Problems in Plasma machines", Proceedings of the 7th International Vacuum Congress & 3rd International Conference of Solid Surfaces, pp. 359-362, Vienna 1977.
Giorgi, T. et al., "An Updated Review of Getters and Gettering", Journal of Vacuum Science and Technology A, vol. 3, No. 2, pp. 417-423 Mar./Apr. 1985.
"System Grows Complex Single Crystal Materials", Solid-State Technology, vol. 26, No. 7, pp. 39-40, Jul. 1983.
Carella Sergio
Conte Andrea
Krueger Gordon P.
Lorimer D'Arcy H.
SAES Pure Gas, Inc.
Thorpe Timothy S.
Tyler Cheryl J.
LandOfFree
Getter pump module and system does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Getter pump module and system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Getter pump module and system will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1635130