Getter pump module and system

Details Getter pump module and system Getter pump module and system

1994-12-02

1999-06-15

Thorpe, Timothy

Pumps

Electrical or getter type

417 49, 417 51, F04B 3702

Patent

active

059115602

ABSTRACT:
A getter pump module includes a number of getter disks provided with axial holes, and a heating element which extends through the holes to support and heat the getter disks. The getter disks are preferably solid, porous, sintered getter disks that are provided with a titanium hub that engages the heating element. A thermally isolating shield is provided to shield the getter disks from heat sources and heat sinks within the chamber, and to aid in the rapid regeneration of the getter disks. In certain embodiments of the present invention the heat shields are fixed, and in other embodiments the heat shield is movable. An embodiment of the present invention also provides for a rotating getter element to enhance getter material utilization.

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