Getter pump especially suitable for the use upstream, in proximi

Details Getter pump especially suitable for the use upstream, in proximi Getter pump especially suitable for the use upstream, in proximi

1999-01-21

2000-06-13

Walberg, Teresa

Pumps

Electrical or getter type

Getter heating, vaporizing, or regeneration

417 48, F04B 3702

Patent

active

060741716

ABSTRACT:
A getter pump, especially suitable for the use upstream, in proximity and coaxially with respect to a turbomolecular pump, comprising inside a cylindrical cartridge (10) a getter device (20) formed of a continuous coil-shaped metal wire having turns (18, 18a) or formed of several zigzag-shaped segments mutually in series between two end points (22), such as to lie in an annular-shaped peripheral zone, concentric with respect to said cartridge (10) and coated with a sintered porous layer of non-evaporable getter material in form of powder. Said cartridge (10) is inserted into a steel stub (30) which is fastened on one side to the chamber to be evacuated and on the other side to a turbomolecular pump. The getter device (20) may be directly supplied with electric current from the outside through said ends (22).

REFERENCES:
patent: 3662522 (1972-05-01), Della Porta et al.
patent: 4137012 (1979-01-01), Della Porta et al.
patent: 5483803 (1996-01-01), Matte et al.
patent: 5935395 (1999-08-01), Ouellet et al.
patent: 5972183 (1999-10-01), Krueger et al.
patent: 5980213 (1999-11-01), Krueger et al.
patent: 5993165 (1999-11-01), Lorimer et al.
patent: 5997255 (1999-12-01), Krueger et al.

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