GeSiSn-based compounds, templates, and semiconductor structures

Stock material or miscellaneous articles – Composite – Of silicon containing

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C423S324000

Reexamination Certificate

active

08029905

ABSTRACT:
The present invention provides novel compounds of the formula Gei-x-ySixSny, wherein 0.01<y<0.11, and 0.26<x<0.35, and semiconductor structures comprising such compounds. The present invention also provides novel semiconductor structures comprising silicon substrates, an SiGe buffer layer, and a Group III-V or II-VI active layer. The present invention also provides novel semiconductor structures comprising silicon substrates, an SiGe buffer layer, an SiGeSn template layer, and an SiGe, Ge, Group III-V, or Group II-VI active layer.

REFERENCES:
patent: 5187715 (1993-02-01), Weisbuch et al.
patent: 5300794 (1994-04-01), Melman et al.
patent: 5548128 (1996-08-01), Soref et al.
patent: 6136672 (2000-10-01), Bourdelle et al.
patent: 6897471 (2005-05-01), Soref et al.
patent: 6911084 (2005-06-01), Kouvetakis et al.
patent: 7238596 (2007-07-01), Kouvetakis et al.
patent: 7374738 (2008-05-01), Kouvetakis et al.
patent: 7582891 (2009-09-01), Kouvetakis et al.
patent: 7589003 (2009-09-01), Kouvetakis et al.
patent: 7598513 (2009-10-01), Kouvetakis et al.
patent: 2002/0030194 (2002-03-01), Camras et al.
patent: 2002/0101895 (2002-08-01), Augusto
patent: 2002/0140012 (2002-10-01), Droopad
patent: 2002/0154675 (2002-10-01), Deng et al.
patent: 2004/0011280 (2004-01-01), Higuchi et al.
patent: 2004/0261689 (2004-12-01), Kouvetakis et al.
patent: 2005/0056210 (2005-03-01), El-Zein et al.
patent: 2006/0163612 (2006-07-01), Kouvetakis et al.
patent: 2006/0236923 (2006-10-01), Kouvetakis et al.
patent: 2007/0297967 (2007-12-01), Kouvetakis et al.
patent: 2008/0113186 (2008-05-01), Kouvetakis et al.
patent: 2008/0164570 (2008-07-01), Kouvetakis et al.
patent: 2009/0050935 (2009-02-01), Kouvetakis et al.
patent: 0279989 (1988-08-01), None
patent: 63108782 (1988-05-01), None
patent: 02/09187 (2002-01-01), None
patent: 03/033781 (2003-04-01), None
patent: 2003/058644 (2003-07-01), None
patent: 2004/073045 (2004-08-01), None
patent: 2004/114368 (2004-12-01), None
patent: 2005/001902 (2005-01-01), None
patent: 2005/015609 (2005-02-01), None
patent: 2006/031240 (2006-03-01), None
patent: 2006/031257 (2006-03-01), None
patent: 2006/034025 (2006-03-01), None
patent: 2007/062056 (2007-05-01), None
patent: 2007/062096 (2007-05-01), None
Bauer, M., et al., “Synthesis of ternary SiGeSn semiconductors on Si(100) via SnxGe1-x buffer layers,” Applied Physics Letters, Sep. 15, 2003, 83(11):2163-2165.
Kouvetakis, J., et al., “New IR Semiconductors in the Si-Ge-Sn System,” 2004 1st IEEE International Conference on Group IV Photonics, Sep. 29, 2004, pp. 55-57.
Menendez et al., “Type-1 Ge/Ge1-x-ySixSny strained-layer heterostructures with a direct Ge Bandgap” Applied Physics Letters, Aug. 16, 2004, vol. 85, No. 7, pp. 1175-1177.
M. Bauer, et al., Appl. Phys. Lett., 81, 2992-2994 (2002).
A.V.G Chizmeshya, et al. Chem. of Matls., 15, 2511-2519 (2003).
M. Bauer, et al., Appl. Phys. Lett., 83(11), 2163-2165 (2003).
M. Bauer, et al. Appl. Phys. Lett., 83, 3489-3491 (2003).
P. Aella, et al., Appl. Phys. Lett. 84, 888-890 (2004).
R. Roucka, et al., Appl. Phys. Lett. 86(19), 191912-191914 (2005).
G. He and H. Atwater, Appl. Phys. Lett. 68(5), 664-666 (1996).
Pristovsek M., et al., Journal of Crystal Growth 276(3-4), 347-353 (2005).
Wosinski A., et al., Appl. Phys. Lett. 67(8), 1131-1133 (1995).
Dvorak M. W., et al., IEEE Electron Device Letters 22(8), 361-363 (2001).
Ryu, Sang-Wan, et al., Semiconductor Science and Technology 19(12), 1369-1372 (2004).
Dowd P., et al., Electronics Letters 39(13), 987-988 (2003).
Liguang Zheng, et al., IEEE Photonics Technology Letters, 17(3), 651 (2005).
Xiaoguang Sun, et al., IEEE Journal of Selected Topics in Quantum Electronics, vol. 8, Issue 4, 817-822 (2002).
Kaniewski J., et al., Proceedings of SPIE-The International Society for Optical Engineering (2005), 5783 (Pt. 1, Infrared Technology and Applications XXXI), 47-56.
Kang Y., et al., Applied Physics Letters (2004), 85(10), 1668-1670.
Kim S., et al., Jpn. J. App. Phys. 44, 2472-2475 (2005).
Cristea P., et al., J. Cryst. Growth 278(1-4), 544-547 (2005).
Li Y.J., et al., J. of Vac. Sci. Tech. B 22(5), 2429-2433 (2004).
Mao R. W., et al., IEEE Photonics Technology Letters 16(8), (2004).
Pauchard A., et al, Proceedings of SPIE—The International Society for Optical Engineering, 4650 (Photodetector Materials and Devices VII), 37-43 (2002).
Takano Y., et al., Appl. Phys. Lett. 78(1), 93-95 (2001).
Chriqui Y., et al., Optical Materials 27, 846-850 (2005).
V. K. Yang, et al., J. Appl. Phys. 93(9), 5095-5102 (2003).
Kouvetakis et al., Annu. Chem. Mater. Rev. 2006, 36, 497-554.
Tolle et al., Mater. Res. Soc. Symp. Proc. 2006, 891, 0897-EE12-08.1.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

GeSiSn-based compounds, templates, and semiconductor structures does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with GeSiSn-based compounds, templates, and semiconductor structures, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and GeSiSn-based compounds, templates, and semiconductor structures will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-4275571

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.