Germanium silicon heterostructure photodetectors

Details Germanium silicon heterostructure photodetectors Germanium silicon heterostructure photodetectors

2005-07-07

2008-07-08

Landau, Matthew C. (Department: 2815)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Electromagnetic or particle radiation

C257SE31131, C257S656000, C257S184000, C257S616000

Reexamination Certificate

active

07397101

ABSTRACT:
A horizontal germanium silicon heterostructure photodetector comprising a horizontal germanium p-i-n diode disposed over a horizontal parasitic silicon p-i-n diode uses silicon contacts for electrically coupling to the germanium p-i-n through the p-type doped and n-type doped regions in the silicon p-i-n without requiring direct physical contact to germanium material. The current invention may be optically coupled to on-chip and/or off-chip optical waveguide through end-fire or evanescent coupling. In some cases, the doping of the germanium p-type doped and/or n-type doped region may be accomplished based on out-diffusion of dopants in the doped silicon material of the underlying parasitic silicon p-i-n during high temperature steps in the fabrication process such as, the germanium deposition step(s), cyclic annealing, contact annealing and/or dopant activation.

REFERENCES:
patent: 6897498 (2005-05-01), Gothoskar et al.
Gianlorenzo Masini, et al. “High-Performance p-i-n Ge on Si Photodetectors for the Near Infrared: From Model to Demonstration”, Jun. 2001, 5 pages, vol. 48, No. 6.

Affiliated with

Also associated with

Rating

Germanium silicon heterostructure photodetectors does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Germanium silicon heterostructure photodetectors, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Germanium silicon heterostructure photodetectors will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3963446