Geometrically-Desensitized interferometer with adjustable range

Details Geometrically-Desensitized interferometer with adjustable range Geometrically-Desensitized interferometer with adjustable range

1998-01-06

2000-01-04

Kim, Robert H.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356354, 356359, G01B 902

Patent

active

060116242

ABSTRACT:
A geometrically-desensitized interferometer (GDI) instrument incorporates a light generator, an optical assembly, an imaging device, and an adjustable mechanism for selectively altering the transmission of light through or the reception of light from the optical grating assembly so as to alter the operation of the GDI instrument. The adjustable mechanism may be disposed between the light generator and the optical assembly so as to at least selectively alter the effective lateral length of the light generator and hence selectively adjust the range of measurement depths of the instrument. The instrument therefore is selectively capable of operating in a high coherence mode, a low coherence mode, or in between. Instead of or in addition to a light generator adjustment mechanism, the adjustable mechanism could comprise an aperture which shapes light entering the imaging device so as to enhance the instrument's ability to profile objects with rough surfaces.

REFERENCES:
patent: 4594003 (1986-06-01), Sommargren
patent: 4732483 (1988-03-01), Biegen
patent: 5526116 (1996-06-01), De Groot
patent: 5598265 (1997-01-01), de Groot
Grating Interferometer for Flatness Testing, Optics Letters, vol. 21, No. 3, Feb. 1, 1996, Peter de Groot, pp. 228-230.

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